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Issue Date Title Author(s) Journal View
2019-07
Determination of Dimension and Conformal Arsenic Doping Profile of a Fin Field Effect Transistors by Time-of-Flight Medium Energy Ion Scattering

Min, Won Ja ;  Kim, Jwasoon ;  Park, Kyungsu ;  Marmitt, Gabriel ;  England, Jonathan ;  Moon, DaeWon

American Chemical Society, 2019-07

 333
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